JPH0220210Y2 - - Google Patents

Info

Publication number
JPH0220210Y2
JPH0220210Y2 JP1986129323U JP12932386U JPH0220210Y2 JP H0220210 Y2 JPH0220210 Y2 JP H0220210Y2 JP 1986129323 U JP1986129323 U JP 1986129323U JP 12932386 U JP12932386 U JP 12932386U JP H0220210 Y2 JPH0220210 Y2 JP H0220210Y2
Authority
JP
Japan
Prior art keywords
shield
target material
target
electrode
high voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986129323U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339164U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986129323U priority Critical patent/JPH0220210Y2/ja
Publication of JPS6339164U publication Critical patent/JPS6339164U/ja
Application granted granted Critical
Publication of JPH0220210Y2 publication Critical patent/JPH0220210Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1986129323U 1986-08-25 1986-08-25 Expired JPH0220210Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986129323U JPH0220210Y2 (en]) 1986-08-25 1986-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129323U JPH0220210Y2 (en]) 1986-08-25 1986-08-25

Publications (2)

Publication Number Publication Date
JPS6339164U JPS6339164U (en]) 1988-03-14
JPH0220210Y2 true JPH0220210Y2 (en]) 1990-06-01

Family

ID=31025800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129323U Expired JPH0220210Y2 (en]) 1986-08-25 1986-08-25

Country Status (1)

Country Link
JP (1) JPH0220210Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113734A (ja) * 1983-11-26 1985-06-20 Fukashi Uragami 四輪駆動車両
JP2617368B2 (ja) * 1990-05-02 1997-06-04 アネルバ株式会社 スパッタリング装置
US7815782B2 (en) * 2006-06-23 2010-10-19 Applied Materials, Inc. PVD target
US9834840B2 (en) * 2010-05-14 2017-12-05 Applied Materials, Inc. Process kit shield for improved particle reduction

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58497U (ja) * 1981-06-26 1983-01-05 株式会社日立製作所 ア−スシ−ルド板

Also Published As

Publication number Publication date
JPS6339164U (en]) 1988-03-14

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